FIS4-High Resolution
Four-wave Interferometric Sensor
Wide spectral range (400nm~900nm)
High resolution of 90,000 phase points
2nm RMS High phase resolution
Developed for convenient interferometry in industry and research. High resolution of 300×300 (90,000) phase points, 400-900nm wide spectral response, 10 frame full resolution real-time 3D result display, For laser beam wavefront detection, adaptive optics, optical system calibration, optical window detection, optical surface shape, spherical surface shape measurement, surface roughness, surface micro profile detection and so on to provide an ideal wavefront sensing measurement tool.
FIS4 HR uses the patented technology of random coded four-wave diffraction to realize self-interference in front of a single measured wave, and interferes at the position of the rear image plane. The interference measurement can be realized by means of ordinary imaging system with low requirement on the coherence of light source and no need of phase shifting. It has ultra-high vibration resistance and ultra-high stability, and can achieve NM-level precision measurement without vibration isolation. Compared with microlens array Hartman sensor, it has more high-resolution phase points, wider adaptive band range, larger dynamic range, and better cost performance.
◆ Single light self-interference, no reference mirror
◆ Wide spectrum 400nm~900nm band
◆ 2nm RMS high phase resolution
◆ Strong vibration resistance, no optical vibration isolation
◆ Easy and fast interference light path construction
◆ Support collimation beam, large NA convergence beam
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Wavelength range |
400nm~900nm |
|
Target size |
7.07mm×7.07mm |
|
Spatial resolution |
23.6μm |
|
Image pixel |
2048×2048 |
|
Phase output resolution |
300×300（90000pixel） |
|
Phase resolution |
＜2nmRMS |
|
Absolute accuracy |
10nmRMS |
|
Dynamic range |
110μm（150λ） |
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Sampling rate |
24fps |
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Real-time processing speed |
10Hz（At full resolution） |
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Interface type |
GIGE |
|
dimension |
56.5mm×43mm×41.5mm |
|
weight |
about 120g |
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0757-6668-88268
Hangzhou Zernike Optical Technology Co., LTD
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Jiangsu Yucheng light sense technology Co., LTD
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Record number: Su ICP for 2024068497
TEL：18012804887
EMAIL：zernikeoptics@zernikeoptics.cn
Address:：No. 96-3 Tianpu Road, Jiangbei New District, Nanjing City, Jiangsu Province
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