FIS4-Ultraviolet Four-wave Interferometric Sensor

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FIS4-Ultraviolet
Four-wave Interferometric Sensor

Near ultraviolet spectrum (200nm~450nm)

Super high resolution of 262144 phase points

Absolute accuracy up to 10nmRMS

The ultra-high resolution of 512×512 (262144) phase points enables high-precision wavefront measurement from 200nm to 450nm band, which can be used for optical system aberration measurement, optical system calibration, planar (wafer) surface shape measurement, optical spherical surface shape measurement, etc.

FIS4 UV combines the patented technology of random coding four-wave diffraction with the ultraviolet camera to interfere at the position of the rear image plane, which requires low coherence of the light source and does not require phase shifting. With the ultraviolet imaging system, the wave front real-time measurement can be achieved, with ultra-high vibration resistance and ultra-high stability, and NM-level precision measurement can be achieved without vibration isolation.

Main feature

◆ Single light interference, no reference light

◆ UV spectrum 200nm~450nm band

◆ 2nm RMS high phase resolution

◆ Strong vibration resistance, no optical vibration isolation

◆ Like imaging, simple and fast light path construction

◆ Support collimated beam, high NA non-collimated beam

Product application

optical system aberration measurement、optical system calibration、planar (wafer) surface shape measurement、optical spherical surface shape measurement

Product specification

Wavelength range	200nm~450nm
Target size	9mm×9mm
Spatial resolution	26μm
Sampling resolution	512×512（262144pixel）
Phase resolution	＜2nmRMS
Absolute accuracy	10nmRMS
Dynamic range	80μm（256λ）
Sampling rate	32fps
Real-time processing speed	10Hz（Full resolution）
Interface type	USB3.0
dimension	70mm×46.5mm×68.5mm
weight	about 240g

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CONTACT

7X24小时电话周一至周六 9:00-18:00

0757-6668-88268

Hangzhou Zernike Optical Technology Co., LTD
Full range of authorized dealers

Jiangsu Yucheng light sense technology Co., LTD

7X24 hours telephone Monday to Saturday 9:00-18:00

180-1280-4887

电话：0757-666888268

传真：0757-666999368

公司地址：佛山市禅城区某某某路同某某莫大厦1208

备案号：粤ICP备100000000-1号

Record number: Su ICP for 2024068497

TEL：18012804887

EMAIL：zernikeoptics@zernikeoptics.cn

Address:：No. 96-3 Tianpu Road, Jiangbei New District, Nanjing City, Jiangsu Province

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