FIS4-Ultra High Resolution
Four-wave Interferometric Sensor
Wide spectral range (400nm~900nm)
Super high resolution of 262144 phase points
2nm RMS High phase resolution
Specially developed to help scientific research and high-precision industrial scenarios, higher resolution can have more details in wave front detection, ultra-high resolution of 512×512 (262144) phase points, wide spectral response of 400-900nm, 10 frame full resolution real-time 3D results display, For laser beam wavefront detection, adaptive optics, surface shape measurement, optical system calibration, optical window detection, optical spherical surface shape measurement, surface roughness detection, surface micro profile and so on to provide an ideal wavefront sensing measurement tool.
FIS4 UHR adopts the patented technology of random coding four-wave diffraction to achieve single-channel wavefront self-interference, interferes at the position of the rear image plane, has low requirements for the coherence of the light source, and does not need to shift the phase. Ordinary imaging systems can realize interference measurement, with ultra-high vibration resistance and ultra-high stability, and can achieve NM-level precision measurement without vibration isolation. Compared with microlens array, Hartmann sensor has more phase points, wider adaptive band range, wider dynamic range and lower price.
◆ Ultra-high resolution of 512×512 (262144) phase points
◆ Single light interference, no reference light
◆ Wide spectrum 400nm~900nm band
◆ 2nm RMS high phase resolution
◆ Strong vibration resistance, no optical vibration isolation
◆ Like imaging, simple and fast light path construction
◆ Support collimation beam, large NA convergence beam
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Wavelength range |
400nm~900nm |
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Target size |
9mm×9mm |
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Spatial resolution |
26μm |
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Sampling resolution |
512×512(262144pixel) |
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Phase resolution |
<2nmRMS |
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Absolute accuracy |
15nmRMS |
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Dynamic range |
162μm(256λ) |
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Sampling rate |
32fps |
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Real-time processing speed |
10Hz(Full resolution) |
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Interface type |
USB3.0 |
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dimension |
70mm×46.5mm×68.5mm |
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weigh |
about 240g |
